WebMar 1, 1995 · Thermal gas-phase etching of titanium nitride (TiN) by thionyl chloride (SOCl2) S. Varun, T. Blomberg, +6 authors M. Ritala Physics Applied Surface Science 2024 1 Transition metal nitride formed by simultaneous physisorption and thermal evaporation; TiN/Si (100) Sook Ahn, J. Han, J. Seo Physics 1998

Dry etching of titanium nitride thin films in CF4–O2 plasmas

All reagents and chemicals are used without further purification. N-methyl-2-pyrrolidone (NMP), potassium hydroxide (KOH) pellets, acetylene black, poly (vinylidene fluoride) … See more The working electrodes are prepared according to the following method. Active material CrON nanoparticles (80 wt%), PVDF (5 wt%), and acetylene black (15 wt%) are grounded well, and the slurry ink is prepared using … See more Synthesis of CrON nanoparticle is reported earlier by our group in the context of supercapacitor application [30]. In brief, chromium chloride … See more X-ray diffraction (XRD) of powder samples are measured on Bruker D8 Discover AXS powder x-ray diffractometer with high intensity of Cu Kαradiation source (1.5418 Å) in a 2θ range from 10° to 90°.The … See more WebApr 1, 1993 · COMBUSTION AND FLAME 93:119-137 (1993) 119 Thermodynamics of Gas Phase Chromium Species: The Chromium Oxides, the Chromium Oxyhydroxides, and … jill shalvis animal magnetism series in order

Chapter 1.10 - Miscellaneous Etchants - University of …

WebJan 30, 2004 · These behaviors raised the question about the chemical nature of the films. Consequently further work was devoted to clarify if the films consist of a mixture of CrN and Cr 2 O 3 or if they are stoichiometric chromium oxynitride.. The absence of Cr 2 O 3 peaks in the XRD spectra did already give a first indication that the films are oxynitrides. If the … WebAug 21, 2014 · We present two simple methods, with parallel and serial gas flows, for the stacking of microfabricated silicon fuel cells with integrated current collectors, flow fields and gas diffusion layers. The gas diffusion layer is implemented using black silicon. In the two stacking methods proposed in this work, the fluidic apertures and gas flow topology are … WebGas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks Abstract A method for the dry removal of a material on a... jill shafer wsu